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Journal: Micromachines, 2022
Volume: 13
Number: 37
Article:
Design and Fabrication of a Ka Band RF MEMS Switch with High Capacitance Ratio and Low Actuation Voltage
Authors:
by
Kun Deng, Fuxing Yang, Yucheng Wang, Chengqi Lai and Ke Han
Link:
https://www.mdpi.com/2072-666X/13/1/37
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