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Journal: Micromachines, 2021
Volume: 12
Number: 1127
Article:
Investigation on Design Theory and Performance Analysis of Vacuum Capacitive Micromachined Ultrasonic Transducer
Authors:
by
Xiao Huang, Hongliang Wang and Lijun Yu
Link:
https://www.mdpi.com/2072-666X/12/9/1127
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