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Article

Electrostatically Tuned Optical Filters Based on Hybrid Plasmonic-Dielectric Thin Films for Hyperspectral Imaging

1
Center for Nanotechnology, Zewail City of Science and Technology, October Gardens, Giza 12578, Egypt
2
Faculty of Engineering, Ain-Shams University, 1 Elsarayat St., Abbassia, Cairo 11517, Egypt
*
Authors to whom correspondence should be addressed.
Micromachines 2021, 12(7), 767; https://doi.org/10.3390/mi12070767
Submission received: 30 April 2021 / Revised: 30 May 2021 / Accepted: 25 June 2021 / Published: 29 June 2021

Abstract

Hyperspectral imaging has a wide range of uses, from medical diagnostics to crop monitoring; however, conventional hyperspectral imaging systems are relatively slow, bulky, and rather costly. In this paper, we present an inexpensive, compact tunable optical filter for hyperspectral applications. The filter is based on a Fabry-Pérot interferometer utilizing hybrid metallic-dielectric mirrors and actuated using a MEMS electrostatic actuator. The optical filter is designed using the transfer matrix method; then, the results were verified by an electromagnetic wave simulator. The actuator is based on a ring-shaped parallel plate capacitor and is designed using COMSOL Multiphysics. An actuation displacement of 170 nm was used, which is the required distance to tune the filter over the whole visible range (400–700 nm). There are two designs proposed for the optical filter: the first was optimized to provide maximum transmission and the other is optimized to have minimum full-width-half-maximum (FWHM) value. The first design has a maximum transmission percentage of 94.45% and a minimum transmission of 86.34%; while the minimum FWHM design had an average FWHM value of 7.267 nm. The results showed improvements over the current commercial filters both in transmission and in bandwidth.
Keywords: tunable optical filter; visible range filters; hyperspectral imaging; plasmonic filters; MEMS tunable filters; electrostatic actuators tunable optical filter; visible range filters; hyperspectral imaging; plasmonic filters; MEMS tunable filters; electrostatic actuators

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MDPI and ACS Style

Abdelghfar, A.; Mousa, M.A.; Fouad, B.M.; Saad, A.H.; Anous, N.; Gaber, N. Electrostatically Tuned Optical Filters Based on Hybrid Plasmonic-Dielectric Thin Films for Hyperspectral Imaging. Micromachines 2021, 12, 767. https://doi.org/10.3390/mi12070767

AMA Style

Abdelghfar A, Mousa MA, Fouad BM, Saad AH, Anous N, Gaber N. Electrostatically Tuned Optical Filters Based on Hybrid Plasmonic-Dielectric Thin Films for Hyperspectral Imaging. Micromachines. 2021; 12(7):767. https://doi.org/10.3390/mi12070767

Chicago/Turabian Style

Abdelghfar, Ahmed, Mohamed A. Mousa, Bassant M. Fouad, Ahmed H. Saad, Noha Anous, and Noha Gaber. 2021. "Electrostatically Tuned Optical Filters Based on Hybrid Plasmonic-Dielectric Thin Films for Hyperspectral Imaging" Micromachines 12, no. 7: 767. https://doi.org/10.3390/mi12070767

APA Style

Abdelghfar, A., Mousa, M. A., Fouad, B. M., Saad, A. H., Anous, N., & Gaber, N. (2021). Electrostatically Tuned Optical Filters Based on Hybrid Plasmonic-Dielectric Thin Films for Hyperspectral Imaging. Micromachines, 12(7), 767. https://doi.org/10.3390/mi12070767

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