Li, H.; Lin, Z.; Guo, Y.; Song, J.; Huang, R.; Lin, Z.
The Effect of Nitrogen Incorporation on the Optical Properties of Si-Rich a-SiCx Films Deposited by VHF PECVD. Micromachines 2021, 12, 637.
https://doi.org/10.3390/mi12060637
AMA Style
Li H, Lin Z, Guo Y, Song J, Huang R, Lin Z.
The Effect of Nitrogen Incorporation on the Optical Properties of Si-Rich a-SiCx Films Deposited by VHF PECVD. Micromachines. 2021; 12(6):637.
https://doi.org/10.3390/mi12060637
Chicago/Turabian Style
Li, Hongliang, Zewen Lin, Yanqing Guo, Jie Song, Rui Huang, and Zhenxu Lin.
2021. "The Effect of Nitrogen Incorporation on the Optical Properties of Si-Rich a-SiCx Films Deposited by VHF PECVD" Micromachines 12, no. 6: 637.
https://doi.org/10.3390/mi12060637
APA Style
Li, H., Lin, Z., Guo, Y., Song, J., Huang, R., & Lin, Z.
(2021). The Effect of Nitrogen Incorporation on the Optical Properties of Si-Rich a-SiCx Films Deposited by VHF PECVD. Micromachines, 12(6), 637.
https://doi.org/10.3390/mi12060637