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Journal: Micromachines, 2021
Volume: 12
Number: 528
Article:
Study for Laser Controlled Fabrication of Micro/Nano-Structures of Silicon Based on Multi-Physics Model
Authors:
by
Liqun Wu, Jianlong Chen, Linan Zhang, Hongcheng Wang and Chao Chen
Link:
https://www.mdpi.com/2072-666X/12/5/528
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