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Journal: Micromachines, 2021
Volume: 12
Number: 507

Article: Biaxial Angular Acceleration Sensor with Rotational-Symmetric Spiral Channels and MEMS Piezoresistive Cantilevers
Authors: by Rihachiro Nakashima and Hidetoshi Takahashi
Link: https://www.mdpi.com/2072-666X/12/5/507

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