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Journal: Micromachines, 2021
Volume: 12
Number: 378

Article: Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning
Authors: by Qiang Wang, Weimin Wang, Xuye Zhuang, Chongxi Zhou and Bin Fan
Link: https://www.mdpi.com/2072-666X/12/4/378

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