He, Y.; Si, C.; Han, G.; Zhao, Y.; Ning, J.; Yang, F.
A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers. Micromachines 2021, 12, 102.
https://doi.org/10.3390/mi12020102
AMA Style
He Y, Si C, Han G, Zhao Y, Ning J, Yang F.
A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers. Micromachines. 2021; 12(2):102.
https://doi.org/10.3390/mi12020102
Chicago/Turabian Style
He, Yurong, Chaowei Si, Guowei Han, Yongmei Zhao, Jin Ning, and Fuhua Yang.
2021. "A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers" Micromachines 12, no. 2: 102.
https://doi.org/10.3390/mi12020102
APA Style
He, Y., Si, C., Han, G., Zhao, Y., Ning, J., & Yang, F.
(2021). A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers. Micromachines, 12(2), 102.
https://doi.org/10.3390/mi12020102