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Journal: Micromachines, 2021
Volume: 12
Number: 1548

Article: Enhancing the Shock Response Performance of Micromachined Silicon Resonant Accelerometers by Electrostatic Active Damping Control
Authors: by Libin Huang, Kai Jiang, Peng Wang, Meimei Zhang, Xukai Ding and Hongsheng Li
Link: https://www.mdpi.com/2072-666X/12/12/1548

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