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Journal: Micromachines, 2021
Volume: 12
Number: 1547
Article:
Study on the Mechanism of Solid-Phase Oxidant Action in Tribochemical Mechanical Polishing of SiC Single Crystal Substrate
Authors:
by
Wanting Qi, Xiaojun Cao, Wen Xiao, Zhankui Wang and Jianxiu Su
Link:
https://www.mdpi.com/2072-666X/12/12/1547
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