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Journal: Micromachines, 2021
Volume: 12
Number: 1546

Article: Fabricating Silicon Resonators for Analysing Biological Samples
Authors: by Momoko Kumemura, Deniz Pekin, Vivek Anand Menon, Isabelle Van Seuningen, Dominique Collard and Mehmet Cagatay Tarhan
Link: https://www.mdpi.com/2072-666X/12/12/1546

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