Theoretical Thermal-Mechanical Modelling and Experimental Validation of a Three-Dimensional (3D) Electrothermal Microgripper with Three Fingers
Abstract
:1. Introduction
2. Structural Design of the 3D U-Shaped Electrothermal Actuator
3. Theoretical Modeling of the 3D U-Shaped Actuator
4. Finite Element Analysis of the 3D U-Shaped Actuator
5. Experimental Validation of the Theoretical Model
6. Parameter Analyses of the 3D U-Shaped Actuator
7. Testing of the 3D Microgripper
7.1. Testing of the 3D U-Shaped Actuator
7.2. Testing of the Z-Shaped Actuator
8. Micro-Manipulation Experiments
8.1. Manipulations of a Micro Ball
8.2. Manipulations of a Zebrafish Embryo
9. Conclusions
Supplementary Materials
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
Appendix A. Elongation and Deflection of a Cantilever Beam
References
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Challenge | Address the Challenge |
---|---|
A planar microgripper with multi-DOFs only brings the flexibility for the planar manipulation of microobjects | A three-finger microgripper that can operate micro objects in space is proposed. |
A multi-finger microgripper has only one DOF for each finger | A three-finger microgripper with multiple DOFs for each finger is proposed. |
Design and manufacture of the 3-fingers electrothermal microgripper | A novel 3D electro-thermal microgripper that can provide multi DOFs with three fingers is designed. Each finger is composed of a novel 3D U-shaped actuator and a bi-directional Z-shaped actuator. Besides, the microgripper is processed integrally by 3D printing. |
The static theoretical model of 3D U-shaped actuator is deduced. | The theoretical relationship between the input temperature load and the output displacement of 3D U-shaped electrothermal actuator is deduced by using the superposition principle and deflection formula. |
Measure the temperature of the beams of the 3D U-shaped actuator. | The average beams temperature is obtained by taking the average measured temperatures of many measuring points. |
Due to manufacturing limitations, the dimension of the microgripper tip is larger than the micro object. | The glass capillary is assembled with the tip of the microgripper to operate the micro object. |
Symbol | Definition | Value |
---|---|---|
Distance between two opposite beams | 9.5 | |
Distance between two adjacent beams in the different direction | 2.75 | |
Distance between two adjacent beams in the same direction | 4 | |
Distance between the beam and base boundary | 3 | |
Width of the beam | 2 | |
Length of base | 12 | |
Thickness of beam | 1.5 | |
Distance between beam and base boundary | 0.5 | |
Height of the base | 3 | |
Length of the beam | 50 |
External Load (N) | Temperature (K) | Tip Displacement (mm) | Error (%) | |
---|---|---|---|---|
F = 0 | 400 | 0.2669 | 0.2649 | 0.7493 |
500 | 0.5331 | 0.5298 | 0.6190 | |
600 | 0.7986 | 0.7947 | 0.4884 | |
700 | 1.0635 | 1.0596 | 0.3667 | |
F = 0.1N | 400 | 0.2649 | 0.2619 | 1.1325 |
500 | 0.5311 | 0.5268 | 0.8096 | |
600 | 0.7966 | 0.7917 | 0.6151 | |
700 | 1.0615 | 1.0566 | 0.4616 | |
F = K*Δ | 400 | 0.2665 | 0.2647 | 0.6754 |
500 | 0.5323 | 0.5293 | 0.5636 | |
600 | 0.7973 | 0.7940 | 0.4139 | |
700 | 1.0617 | 1.0586 | 0.2920 |
Input Voltage (V) | Average Temperature Rise (°C) | Measured (μm) | Analytical (μm) | Deviation (%) |
---|---|---|---|---|
9 | 14.8 | 34.463 | 39.544 | 12.849 |
10 | 16.3 | 38.157 | 43.551 | 12.385 |
11 | 19.2 | 44.867 | 51.297 | 12.535 |
12 | 22.8 | 53.281 | 60.913 | 12.529 |
13 | 26.9 | 64.013 | 71.862 | 10.922 |
14 | 32 | 75.151 | 85.481 | 12.085 |
15 | 36.6 | 86.853 | 97.762 | 11.159 |
16 | 42 | 99.349 | 112.178 | 11.436 |
17 | 48.2 | 113.884 | 128.727 | 11.531 |
Parameter | The Displacement |
---|---|
Length of beam | Polynomially increase with |
Width of beam | Polynomially decrease with |
Thickness of beam | Polynomially decease with |
Distance from beam | Polynomially decease with d |
Distance between adjacent beams | Linearly increase with |
When the area is constant, the width of the beam | Polynomially increasing first and then decreasing with |
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Si, G.; Sun, L.; Zhang, Z.; Zhang, X. Theoretical Thermal-Mechanical Modelling and Experimental Validation of a Three-Dimensional (3D) Electrothermal Microgripper with Three Fingers. Micromachines 2021, 12, 1512. https://doi.org/10.3390/mi12121512
Si G, Sun L, Zhang Z, Zhang X. Theoretical Thermal-Mechanical Modelling and Experimental Validation of a Three-Dimensional (3D) Electrothermal Microgripper with Three Fingers. Micromachines. 2021; 12(12):1512. https://doi.org/10.3390/mi12121512
Chicago/Turabian StyleSi, Guoning, Liangying Sun, Zhuo Zhang, and Xuping Zhang. 2021. "Theoretical Thermal-Mechanical Modelling and Experimental Validation of a Three-Dimensional (3D) Electrothermal Microgripper with Three Fingers" Micromachines 12, no. 12: 1512. https://doi.org/10.3390/mi12121512