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Journal: Micromachines, 2021
Volume: 12
Number: 1143
Article:
Comparison between Bosch and STiGer Processes for Deep Silicon Etching
Authors:
by
Thomas Tillocher, Jack Nos, Gaëlle Antoun, Philippe Lefaucheux, Mohamed Boufnichel and Rémi Dussart
Link:
https://www.mdpi.com/2072-666X/12/10/1143
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