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Journal: Micromachines, 2021
Volume: 12
Number: 89

Article: Sidewall Slope Control of InP Via Holes for 3D Integration
Authors: by Jongwon Lee, Kilsun Roh, Sung-Kyu Lim and Youngsu Kim
Link: https://www.mdpi.com/2072-666X/12/1/89

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