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Journal: Micromachines, 2021
Volume: 12
Number: 70
70
Article: The Wafer-Level Integration of Single-Crystal LiNbO₃ on Silicon via Polyimide Material
Authors: by Xiangyu Yang, Wenping Geng, Kaixi Bi, Linyu Mei, Yaqing Li, Jian He, Jiliang Mu, Xiaojuan Hou and Xiujian Chou
Link: https://www.mdpi.com/2072-666X/12/1/70

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