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Journal: Micromachines, 2020
Volume: 11
Number: 253

Article: Etching of Uncompensated Convex Corners with Sides along <n10> and <100> in 25 wt% TMAH at 80 °C
Authors: by Milče M. Smiljanić, Žarko Lazić, Vesna Jović, Branislav Radjenović and Marija Radmilović-Radjenović
Link: https://www.mdpi.com/2072-666X/11/3/253

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