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Journal: Micromachines, 2020
Volume: 11
Number: 1126
Article:
Manufacturability and Stress Issues in 3D Silicon Detector Technology at IMB-CNM
Authors:
by
David Quirion, Maria Manna, Salvador Hidalgo and Giulio Pellegrini
Link:
https://www.mdpi.com/2072-666X/11/12/1126
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