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Journal: Micromachines, 2020
Volume: 11
Number: 1126

Article: Manufacturability and Stress Issues in 3D Silicon Detector Technology at IMB-CNM
Authors: by David Quirion, Maria Manna, Salvador Hidalgo and Giulio Pellegrini
Link: https://www.mdpi.com/2072-666X/11/12/1126

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