Next Article in Journal
A Novel Algorithm for Routing Paths Selection in Mesh-Based Optical Networks-on-Chips
Next Article in Special Issue
Joule Heating Effects on Transport-Induced-Charge Phenomena in an Ultrathin Nanopore
Previous Article in Journal
Editorial for the Special Issue on Femtosecond Laser Micromachining for Photonics Applications
Previous Article in Special Issue
Single-Molecule Counting of Nucleotide by Electrophoresis with Nanochannel-Integrated Nano-Gap Devices
Article

Advanced Top-Down Fabrication for a Fused Silica Nanofluidic Device

1
Department of Applied Chemistry, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
2
Department of Bioengineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
3
Laboratory for Advanced Nuclear Energy, Institute of Innovative Research, Tokyo Institute of Technology, 2-12-1-N1-6, Ookayama, Meguro-ku, Tokyo 152-8550, Japan
*
Authors to whom correspondence should be addressed.
Micromachines 2020, 11(11), 995; https://doi.org/10.3390/mi11110995
Received: 14 October 2020 / Revised: 29 October 2020 / Accepted: 29 October 2020 / Published: 9 November 2020
(This article belongs to the Special Issue Advances in Nanofluidics)
Nanofluidics have recently attracted significant attention with regard to the development of new functionalities and applications, and producing new functional devices utilizing nanofluidics will require the fabrication of nanochannels. Fused silica nanofluidic devices fabricated by top-down methods are a promising approach to realizing this goal. Our group previously demonstrated the analysis of a living single cell using such a device, incorporating nanochannels having different sizes (102–103 nm) and with branched and confluent structures and surface patterning. However, fabrication of geometrically-controlled nanochannels on the 101 nm size scale by top-down methods on a fused silica substrate, and the fabrication of micro-nano interfaces on a single substrate, remain challenging. In the present study, the smallest-ever square nanochannels (with a size of 50 nm) were fabricated on fused silica substrates by optimizing the electron beam exposure time, and the absence of channel breaks was confirmed by streaming current measurements. In addition, micro-nano interfaces between 103 nm nanochannels and 101 μm microchannels were fabricated on a single substrate by controlling the hydrophobicity of the nanochannel surfaces. A micro-nano interface for a single cell analysis device, in which a nanochannel was connected to a 101 μm single cell chamber, was also fabricated. These new fabrication procedures are expected to advance the basic technologies employed in the field of nanofluidics. View Full-Text
Keywords: nanofluidics; nanochannel; micro-nano interface; nanofabrication; top-down fabrication; lab-on-a-chip; streaming current nanofluidics; nanochannel; micro-nano interface; nanofabrication; top-down fabrication; lab-on-a-chip; streaming current
Show Figures

Figure 1

MDPI and ACS Style

Morikawa, K.; Kazoe, Y.; Takagi, Y.; Tsuyama, Y.; Pihosh, Y.; Tsukahara, T.; Kitamori, T. Advanced Top-Down Fabrication for a Fused Silica Nanofluidic Device. Micromachines 2020, 11, 995. https://doi.org/10.3390/mi11110995

AMA Style

Morikawa K, Kazoe Y, Takagi Y, Tsuyama Y, Pihosh Y, Tsukahara T, Kitamori T. Advanced Top-Down Fabrication for a Fused Silica Nanofluidic Device. Micromachines. 2020; 11(11):995. https://doi.org/10.3390/mi11110995

Chicago/Turabian Style

Morikawa, Kyojiro, Yutaka Kazoe, Yuto Takagi, Yoshiyuki Tsuyama, Yuriy Pihosh, Takehiko Tsukahara, and Takehiko Kitamori. 2020. "Advanced Top-Down Fabrication for a Fused Silica Nanofluidic Device" Micromachines 11, no. 11: 995. https://doi.org/10.3390/mi11110995

Find Other Styles
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop