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Open AccessArticle

An Approach to Ring Resonator Biosensing Assisted by Dielectrophoresis: Design, Simulation and Fabrication

1
Institute of Biotechnology, Technische Universität Berlin, Ackerstrasse 76, 13355 Berlin, Germany
2
Department of High Frequency Technology/Photonics, Technische Universität Berlin, Einsteinufer 25, 10587 Berlin, Germany
3
IHP–Leibniz-Institut für Innovative Mikroelektronik, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(11), 954; https://doi.org/10.3390/mi11110954
Received: 4 October 2020 / Revised: 20 October 2020 / Accepted: 21 October 2020 / Published: 22 October 2020
(This article belongs to the Special Issue Biosensors and MEMS-based Diagnostic Applications)
The combination of extreme miniaturization with a high sensitivity and the potential to be integrated in an array form on a chip has made silicon-based photonic microring resonators a very attractive research topic. As biosensors are approaching the nanoscale, analyte mass transfer and bonding kinetics have been ascribed as crucial factors that limit their performance. One solution may be a system that applies dielectrophoretic forces, in addition to microfluidics, to overcome the diffusion limits of conventional biosensors. Dielectrophoresis, which involves the migration of polarized dielectric particles in a non-uniform alternating electric field, has previously been successfully applied to achieve a 1000-fold improved detection efficiency in nanopore sensing and may significantly increase the sensitivity in microring resonator biosensing. In the current work, we designed microring resonators with integrated electrodes next to the sensor surface that may be used to explore the effect of dielectrophoresis. The chip design, including two different electrode configurations, electric field gradient simulations, and the fabrication process flow of a dielectrohoresis-enhanced microring resonator-based sensor, is presented in this paper. Finite element method (FEM) simulations calculated for both electrode configurations revealed ∇E2 values above 1017 V2m−3 around the sensing areas. This is comparable to electric field gradients previously reported for successful interactions with larger molecules, such as proteins and antibodies. View Full-Text
Keywords: biosensor; microring resonator; photonic sensor; dielectrophoresis; mass transfer; micro fabrication biosensor; microring resonator; photonic sensor; dielectrophoresis; mass transfer; micro fabrication
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MDPI and ACS Style

Henriksson, A.; Kasper, L.; Jäger, M.; Neubauer, P.; Birkholz, M. An Approach to Ring Resonator Biosensing Assisted by Dielectrophoresis: Design, Simulation and Fabrication. Micromachines 2020, 11, 954. https://doi.org/10.3390/mi11110954

AMA Style

Henriksson A, Kasper L, Jäger M, Neubauer P, Birkholz M. An Approach to Ring Resonator Biosensing Assisted by Dielectrophoresis: Design, Simulation and Fabrication. Micromachines. 2020; 11(11):954. https://doi.org/10.3390/mi11110954

Chicago/Turabian Style

Henriksson, Anders; Kasper, Laura; Jäger, Matthias; Neubauer, Peter; Birkholz, Mario. 2020. "An Approach to Ring Resonator Biosensing Assisted by Dielectrophoresis: Design, Simulation and Fabrication" Micromachines 11, no. 11: 954. https://doi.org/10.3390/mi11110954

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