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Journal: Micromachines, 2019
Volume: 10
Number: 432

Article: Design and Fabrication of a Push-Pull Electrostatic Actuated Cantilever Waveguide Scanner
Authors: by Wei-Chih Wang, Kebin Gu and ChiLeung Tsui
Link: https://www.mdpi.com/2072-666X/10/7/432

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