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Journal: Micromachines, 2019
Volume: 10
Number: 432
Article:
Design and Fabrication of a Push-Pull Electrostatic Actuated Cantilever Waveguide Scanner
Authors:
by
Wei-Chih Wang, Kebin Gu and ChiLeung Tsui
Link:
https://www.mdpi.com/2072-666X/10/7/432
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