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Journal: Micromachines, 2019
Volume: 10
Number: 877

Article: Study on a High Performance MEMS Infrared Thermopile Detector
Authors: by Aida Bao, Cheng Lei, Haiyang Mao, Ruirui Li and Yihao Guan
Link: https://www.mdpi.com/2072-666X/10/12/877

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