Next Article in Journal
Antimicrobial Activity of Silver Containing Crosslinked Poly(Acrylic Acid) Fibers
Previous Article in Journal
Functional Metallic Microcomponents via Liquid-Phase Multiphoton Direct Laser Writing: A Review
Open AccessTechnical Note

Atmospheric Pressure Plasma Processing of an Optical Sinusoidal Grid

Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China
*
Authors to whom correspondence should be addressed.
Micromachines 2019, 10(12), 828; https://doi.org/10.3390/mi10120828
Received: 26 October 2019 / Revised: 23 November 2019 / Accepted: 25 November 2019 / Published: 28 November 2019
(This article belongs to the Special Issue Ultra Precision Technologies for Micromachining)
Sinusoidal grid with nanometric precision is adopted as a surface encoder to measure multiple degree-of-freedom motions. This paper proposes the atmospheric pressure plasma processing (APPP) technique to fabricate an optical sinusoidal grid surface. The characteristics of removal function and surface generation mechanism are firstly presented. Both simulation and experiment validate the effectiveness of APPP to fabricate a sinusoidal grid surface with nanometric precision. Post mechanical polishing experiments show that APPP features can be well maintained while the surface roughness is greatly reduced to meet the optical requirement.
Keywords: sinusoidal grid; atmospheric pressure plasma processing; post-polishing sinusoidal grid; atmospheric pressure plasma processing; post-polishing
MDPI and ACS Style

Li, D.; Li, N.; Su, X.; Ji, P.; Wang, B. Atmospheric Pressure Plasma Processing of an Optical Sinusoidal Grid. Micromachines 2019, 10, 828.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop