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Simulation Study for Semiconductor Manufacturing System: Dispatching Policies for a Wafer Test Facility

School of Mechanical and Automotive Engineering, Daegu Catholic University, Geongsan-si, Gyeongbuk, 38430, Korea
School of Air Transport, Transportation and Logistics, Korea Aerospace University, Goyang-si, Gyeonggi-do, 10540, Korea
Author to whom correspondence should be addressed.
Sustainability 2019, 11(4), 1119;
Received: 19 December 2018 / Revised: 30 January 2019 / Accepted: 14 February 2019 / Published: 20 February 2019
(This article belongs to the Special Issue Sustainable Intelligent Manufacturing Systems)
PDF [4058 KB, uploaded 21 February 2019]


The manufacture of semiconductor products requires many dedicated steps, and these steps can be grouped into several major phases. One of the major steps found at the end of the wafer fabrication process is the electrical die sorting (EDS) test operation. This paper focuses on dispatching policies in an EDS test facility to reduce unnecessary work for the system. This allows the semiconductor manufacturing facility to achieve better overall efficiency, thereby contributing to sustainable manufacturing by reducing material movements, the use of testing machines, energy consumption, and so on. In the facility, wafer lots are processed on a series of workstations (cells), and the facility holds identical parallel machines. The wafers are moved by an automatic material handling system from cell to cell as well as within cells. We propose several scheduling policies consisting of intercell and intracell material movements for efficient system operation. For this, four intercell scheduling policies and two intracell scheduling policies are introduced, and the effects of combinations are tested and evaluated through simulation experiments to obtain performance measures such as cycle time and work in process. The most efficient results among the combinations are presented as a proposed scheduling policy for a given EDS test facility. View Full-Text
Keywords: Dispatching Policy; Semiconductor; Wafer probing; Wafer sorting; Sustainable system Dispatching Policy; Semiconductor; Wafer probing; Wafer sorting; Sustainable system

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Yoon, H.J.; Chae, J. Simulation Study for Semiconductor Manufacturing System: Dispatching Policies for a Wafer Test Facility. Sustainability 2019, 11, 1119.

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