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Surface Attachment of Gold Nanoparticles Guided by Block Copolymer Micellar Films and Its Application in Silicon Etching

State Key Laboratory of Materials-Oriented Chemical Engineering and College of Chemical Engineering, Nanjing Tech University, Nanjing 210009, Jiangsu, China
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Academic Editor: Martin Frank
Materials 2015, 8(7), 3793-3805; https://doi.org/10.3390/ma8073793
Received: 15 May 2015 / Revised: 14 June 2015 / Accepted: 17 June 2015 / Published: 24 June 2015
(This article belongs to the Section Structure Analysis and Characterization)
Patterning metallic nanoparticles on substrate surfaces is important in a number of applications. However, it remains challenging to fabricate such patterned nanoparticles with easily controlled structural parameters, including particle sizes and densities, from simple methods. We report on a new route to directly pattern pre-formed gold nanoparticles with different diameters on block copolymer micellar monolayers coated on silicon substrates. Due to the synergetic effect of complexation and electrostatic interactions between the micellar cores and the gold particles, incubating the copolymer-coated silicon in a gold nanoparticles suspension leads to a monolayer of gold particles attached on the coated silicon. The intermediate micellar film was then removed using oxygen plasma treatment, allowing the direct contact of the gold particles with the Si substrate. We further demonstrate that the gold nanoparticles can serve as catalysts for the localized etching of the silicon substrate, resulting in nanoporous Si with a top layer of straight pores. View Full-Text
Keywords: metallic nanoparticle; block copolymer; surface patterning; silicon etching; micelle metallic nanoparticle; block copolymer; surface patterning; silicon etching; micelle
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Wei, M.; Wang, Y. Surface Attachment of Gold Nanoparticles Guided by Block Copolymer Micellar Films and Its Application in Silicon Etching. Materials 2015, 8, 3793-3805.

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