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Materials 2015, 8(10), 6677-6684;

Ultrathin Gas Permeable Oxide Membranes for Chemical Sensing: Nanoporous Ta2O5 Test Study

Department of Chemistry and Chemical Biology, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4M1, Canada
Oak Ridge National Laboratory, Institute for Functional Imaging of Materials and Center for Nanophase Materials Sciences, Oak Ridge, TN 37831, USA
SENSOR Laboratory, Department of Information Engineering, Brescia University and CNR-INO, Brescia 25133, Italy
Department of Physics, Southern Illinois University at Carbondale, Carbondale, IL 62901, USA
Author to whom correspondence should be addressed.
Academic Editor: Dusan Losic
Received: 24 August 2015 / Revised: 17 September 2015 / Accepted: 21 September 2015 / Published: 25 September 2015
(This article belongs to the Special Issue Nanostructured Materials for Chemical Sensing Applications)
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Conductometric gas sensors made of gas permeable metal oxide ultrathin membranes can combine the functions of a selective filter, preconcentrator, and sensing element and thus can be particularly promising for the active sampling of diluted analytes. Here we report a case study of the electron transport and gas sensing properties of such a membrane made of nanoporous Ta2O5. These membranes demonstrated a noticeable chemical sensitivity toward ammonia, ethanol, and acetone at high temperatures above 400 °C. Different from traditional thin films, such gas permeable, ultrathin gas sensing elements can be made suspended enabling advanced architectures of ultrasensitive analytical systems operating at high temperatures and in harsh environments. View Full-Text
Keywords: Ta2O5; metal oxide; ultrathin membrane; gas sensor; gas permeability Ta2O5; metal oxide; ultrathin membrane; gas sensor; gas permeability

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Imbault, A.; Wang, Y.; Kruse, P.; Strelcov, E.; Comini, E.; Sberveglieri, G.; Kolmakov, A. Ultrathin Gas Permeable Oxide Membranes for Chemical Sensing: Nanoporous Ta2O5 Test Study. Materials 2015, 8, 6677-6684.

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