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Journal: Materials, 2012
Volume: 5
Number: 2917

Article: Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application
Authors: by Yunbo Shi, Hao Guo, Haiqiao Ni, Chenyang Xue, Zhichuan Niu, Jun Tang, Jun Liu, Wendong Zhang, Jifang He, Mifeng Li and Ying Yu
Link: https://www.mdpi.com/1996-1944/5/12/2917

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