Next Article in Journal
Mapping Disorder in Polycrystalline Relaxors: A Piezoresponse Force Microscopy Approach
Next Article in Special Issue
Morphologies, Preparations and Applications of Layered Double Hydroxide Micro-/Nanostructures
Previous Article in Journal
Broadband Transformation Optics Devices
Open AccessReview

Ion-Induced Nanoscale Ripple Patterns on Si Surfaces: Theory and Experiment

by Adrian Keller 1,2,* and Stefan Facsko 1
1
Institute of Ion Beam Physics and Materials Research, Forschungszentrum Dresden-Rossendorf, P.O. Box 51 01 19, D-01314 Dresden, Germany
2
Interdisciplinary Nanoscience Center (iNANO), Aarhus University, Ny Munkegade, DK-8000 Aarhus C, Denmark
*
Author to whom correspondence should be addressed.
Materials 2010, 3(10), 4811-4841; https://doi.org/10.3390/ma3104811
Received: 31 August 2010 / Revised: 18 October 2010 / Accepted: 19 October 2010 / Published: 22 October 2010
(This article belongs to the Special Issue Nanomaterials)
Nanopatterning of solid surfaces by low-energy ion bombardment has received considerable interest in recent years. This interest was partially motivated by promising applications of nanopatterned substrates in the production of functional surfaces. Especially nanoscale ripple patterns on Si surfaces have attracted attention both from a fundamental and an application related point of view. This paper summarizes the theoretical basics of ion-induced pattern formation and compares the predictions of various continuum models to experimental observations with special emphasis on the morphology development of Si surfaces during sub-keV ion sputtering. View Full-Text
Keywords: nanopatterning; ion sputtering; surface morphology; continuum theory nanopatterning; ion sputtering; surface morphology; continuum theory
Show Figures

Figure 1

MDPI and ACS Style

Keller, A.; Facsko, S. Ion-Induced Nanoscale Ripple Patterns on Si Surfaces: Theory and Experiment. Materials 2010, 3, 4811-4841.

Show more citation formats Show less citations formats

Article Access Map by Country/Region

1
Only visits after 24 November 2015 are recorded.
Back to TopTop