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Journal: Materials, 2025
Volume: 18
Number: 2911
2911
Article: Silicon Oxycarbide Thin Films Produced by Hydrogen-Induced CVD Process from Cyclic Dioxa-Tetrasilacyclohexane
Authors: by Agnieszka Walkiewicz-Pietrzykowska, Krzysztof Jankowski, Jan Kurjata, Rafał Dolot, Romuald Brzozowski, Joanna Zakrzewska and Paweł Uznanski
Link: https://www.mdpi.com/1996-1944/18/12/2911

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