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Journal: Materials, 2024
Volume: 17
Number: 157
157
Article: Ultra-Smooth Polishing of Single-Crystal Silicon Carbide by Pulsed-Ion-Beam Sputtering of Quantum-Dot Sacrificial Layers
Authors: by Dongyang Qiao, Feng Shi, Ye Tian, Wanli Zhang, Lingbo Xie, Shuangpeng Guo, Ci Song and Guipeng Tie
Link: https://www.mdpi.com/1996-1944/17/1/157

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