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Journal: Materials, 2023
Volume: 16
Number: 1781
1781
Article: In Situ Synchrotron XRD Characterization of Piezoelectric Al_1−xSc_xN Thin Films for MEMS Applications
Authors: by Wenzheng Jiang, Lei Zhu, Lingli Chen, Yumeng Yang, Xi Yu, Xiaolong Li, Zhiqiang Mu and Wenjie Yu
Link: https://www.mdpi.com/1996-1944/16/5/1781

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