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Journal: Materials, 2023
Volume: 16
Number: 7405

Article: XPS Investigation of the Oxidation States of the As-Deposited Ta Films Prepared by Magnetron Sputtering Technology
Authors: by Ming Hu, Zhaowang Li, Xiaoming Gao, Dong Jiang, Zhilu Liu, Longbang Guo, Xu Zhao, Jun He, Jiayi Sun, Lijun Weng and Desheng Wang
Link: https://www.mdpi.com/1996-1944/16/23/7405

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