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10.3390/ma16010295
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Article

A High-Performance ε-Ga2O3-Based Deep-Ultraviolet Photodetector Array for Solar-Blind Imaging

by
Shuren Zhou
,
Qiqi Zheng
,
Chenxi Yu
,
Zhiheng Huang
,
Lingrui Chen
,
Hong Zhang
*,
Honglin Li
,
Yuanqiang Xiong
,
Chunyang Kong
,
Lijuan Ye
* and
Wanjun Li
*
Chongqing Key Laboratory of Photo-Electric Functional Materials, College of Physics and Electronic Engineering, Chongqing Normal University, Chongqing 401331, China
*
Authors to whom correspondence should be addressed.
Materials 2023, 16(1), 295; https://doi.org/10.3390/ma16010295
Submission received: 21 November 2022 / Revised: 20 December 2022 / Accepted: 23 December 2022 / Published: 28 December 2022
(This article belongs to the Special Issue Ultra-Wide Bandgap Semiconductors and Devices)
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Abstract

One of the most important applications of photodetectors is as sensing units in imaging systems. In practical applications, a photodetector array with high uniformity and high performance is an indispensable part of the imaging system. Herein, a photodetector array (5 × 4) consisting of 20 photodetector units, in which the photosensitive layer involves preprocessing commercial ε-Ga2O3 films with high temperature annealing, have been constructed by low-cost magnetron sputtering and mask processes. The ε-Ga2O3 ultraviolet photodetector unit shows excellent responsivity and detectivity of 6.18 A/W and 5 × 1013 Jones, respectively, an ultra-high light-to-dark ratio of 1.45 × 105, and a fast photoresponse speed (0.14/0.09 s). At the same time, the device also shows good solar-blind characteristics and stability. Based on this, we demonstrate an ε-Ga2O3-thin-film-based solar-blind ultraviolet detector array with high uniformity and high performance for solar-blind imaging in optoelectronic integration applications.
Keywords: ε-Ga2O3; solar-blind ultraviolet photodetector; array; imaging ε-Ga2O3; solar-blind ultraviolet photodetector; array; imaging

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MDPI and ACS Style

Zhou, S.; Zheng, Q.; Yu, C.; Huang, Z.; Chen, L.; Zhang, H.; Li, H.; Xiong, Y.; Kong, C.; Ye, L.; et al. A High-Performance ε-Ga2O3-Based Deep-Ultraviolet Photodetector Array for Solar-Blind Imaging. Materials 2023, 16, 295. https://doi.org/10.3390/ma16010295

AMA Style

Zhou S, Zheng Q, Yu C, Huang Z, Chen L, Zhang H, Li H, Xiong Y, Kong C, Ye L, et al. A High-Performance ε-Ga2O3-Based Deep-Ultraviolet Photodetector Array for Solar-Blind Imaging. Materials. 2023; 16(1):295. https://doi.org/10.3390/ma16010295

Chicago/Turabian Style

Zhou, Shuren, Qiqi Zheng, Chenxi Yu, Zhiheng Huang, Lingrui Chen, Hong Zhang, Honglin Li, Yuanqiang Xiong, Chunyang Kong, Lijuan Ye, and et al. 2023. "A High-Performance ε-Ga2O3-Based Deep-Ultraviolet Photodetector Array for Solar-Blind Imaging" Materials 16, no. 1: 295. https://doi.org/10.3390/ma16010295

APA Style

Zhou, S., Zheng, Q., Yu, C., Huang, Z., Chen, L., Zhang, H., Li, H., Xiong, Y., Kong, C., Ye, L., & Li, W. (2023). A High-Performance ε-Ga2O3-Based Deep-Ultraviolet Photodetector Array for Solar-Blind Imaging. Materials, 16(1), 295. https://doi.org/10.3390/ma16010295

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