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Journal: Materials, 2022
Volume: 15
Number: 2941

Article: Investigation of Exfoliation Efficiency of 6H-SiC Implanted Sequentially with He+ and H2+ Ions
Authors: by Guoqiang You, Haipeng Lin, Yanfeng Qu, Jie Hao, Suyuan You and Bingsheng Li
Link: https://www.mdpi.com/1996-1944/15/8/2941

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