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Journal: Materials, 2022
Volume: 15
Number: 8904

Article: Influence of Target-Substrate Distance on the Transport Process of Sputtered Atoms: MC-MD Multiscale Coupling Simulation
Authors: by Guo Zhu, Qixin Du, Baijun Xiao, Ganxin Chen and Zhiyin Gan
Link: https://www.mdpi.com/1996-1944/15/24/8904

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