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Journal: Materials, 2022
Volume: 15
Number: 5596
5596
Article: Versatile Zirconium Oxide (ZrO₂) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography
Authors: by Nicolas Crespo-Monteiro, Arnaud Valour, Victor Vallejo-Otero, Marie Traynar, Stéphanie Reynaud, Emilie Gamet and Yves Jourlin
Link: https://www.mdpi.com/1996-1944/15/16/5596

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