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Journal: Materials, 2021
Volume: 14
Number: 924
924
Article: Effect of Soft X-ray Irradiation on Film Properties of a Hydrogenated Si-Containing DLC Film
Authors: by Kazuhiro Kanda, Ryo Imai, Shotaro Tanaka, Shuto Suzuki, Masahito Niibe, Takayuki Hasegawa, Tsuneo Suzuki and Hiroki Akasaka
Link: https://www.mdpi.com/1996-1944/14/4/924

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