Study on the Physical Properties of a SiNW Biosensor to the Sensitivity of DNA Detection
Abstract
:1. Introduction
2. Materials and Methods
2.1. Materials and Reagents
2.2. Fabrication of a SiNW Biosensor Device
2.3. Functionalization of the SiNW Surface
2.4. Characterization of a SiNW Biosensor Device for DNA Detection
3. Results
3.1. Fabrication of the SiNW Biosensor Device
3.2. Electrical Characteristic of a SiNW Biosensor Device
3.3. Factors Affecting Sensitivity a SiNW Biosensor
3.3.1. Number of Wires
3.3.2. Dimension of Wires
3.3.3. Surface Roughness
3.4. Specificity of a SiNW Biosensor
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Etchants | Devices | Sensitivity (µAM−1) | LOD (fM) |
---|---|---|---|
TMAH and IPA 10 vol.% | 5-wires | 80.3 | 2.22 |
10-wires | 82.8 | 1.93 | |
TMAH and IPA 20 vol.% | 5-wires | 77.5 | 3.63 |
10-wires | 79.0 | 3.20 | |
TMAH and IPA 30 vol.% | 5-wires | 66.0 | 4.15 |
10-wires | 73.5 | 3.87 |
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Yusoh, S.N.; Yaacob, K.A. Study on the Physical Properties of a SiNW Biosensor to the Sensitivity of DNA Detection. Materials 2021, 14, 5716. https://doi.org/10.3390/ma14195716
Yusoh SN, Yaacob KA. Study on the Physical Properties of a SiNW Biosensor to the Sensitivity of DNA Detection. Materials. 2021; 14(19):5716. https://doi.org/10.3390/ma14195716
Chicago/Turabian StyleYusoh, Siti Noorhaniah, and Khatijah Aisha Yaacob. 2021. "Study on the Physical Properties of a SiNW Biosensor to the Sensitivity of DNA Detection" Materials 14, no. 19: 5716. https://doi.org/10.3390/ma14195716