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Journal: Materials, 2021
Volume: 14
Number: 5658
Article:
Silicon Nitride and Hydrogenated Silicon Nitride Thin Films: A Review of Fabrication Methods and Applications
Authors:
by
Nikolett Hegedüs, Katalin Balázsi and Csaba Balázsi
Link:
https://www.mdpi.com/1996-1944/14/19/5658
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