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Journal: Materials, 2021
Volume: 14
Number: 5658

Article: Silicon Nitride and Hydrogenated Silicon Nitride Thin Films: A Review of Fabrication Methods and Applications
Authors: by Nikolett Hegedüs, Katalin Balázsi and Csaba Balázsi
Link: https://www.mdpi.com/1996-1944/14/19/5658

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