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Article

Fabrication of a Micron-Scale Three-Dimensional Single Crystal Diamond Channel Using a Micro-Jet Water-Assisted Laser

Key Laboratory of Physical Electronics and Devices of the Ministry of Education, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, China
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Author to whom correspondence should be addressed.
These two authors contributed equally to this study and share the first authorship.
Academic Editor: Evgeny Levashov
Materials 2021, 14(11), 3006; https://doi.org/10.3390/ma14113006
Received: 2 April 2021 / Revised: 22 May 2021 / Accepted: 24 May 2021 / Published: 1 June 2021
(This article belongs to the Special Issue Advances in Synthetic Diamond Materials)
Two types of a trench with conventional vertical and new reverse-V-shaped cross-sections were fabricated on single crystal diamond (SCD) substrate using a micro-jet water-assisted laser. In addition, a microwave plasma chemical vapor deposition device was used to produce multiple micrometer-sized channels using the epitaxial lateral overgrowth technique. Raman and SEM methods were applied to analyze both types of growth layer characterization. The hollowness of the microchannels was measured using an optical microscope. According to the findings, the epitaxial lateral overgrowth layer of the novel reverse-V-shaped trench produced improved SCD surface morphology and crystal quality. View Full-Text
Keywords: single crystal diamond; micro-water jet guided laser; microchannel single crystal diamond; micro-water jet guided laser; microchannel
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MDPI and ACS Style

Wei, Q.; Zhang, X.; Lin, F.; Wang, R.; Chen, G.; Wang, H.-X. Fabrication of a Micron-Scale Three-Dimensional Single Crystal Diamond Channel Using a Micro-Jet Water-Assisted Laser. Materials 2021, 14, 3006. https://doi.org/10.3390/ma14113006

AMA Style

Wei Q, Zhang X, Lin F, Wang R, Chen G, Wang H-X. Fabrication of a Micron-Scale Three-Dimensional Single Crystal Diamond Channel Using a Micro-Jet Water-Assisted Laser. Materials. 2021; 14(11):3006. https://doi.org/10.3390/ma14113006

Chicago/Turabian Style

Wei, Qiang, Xiaofan Zhang, Fang Lin, Ruozheng Wang, Genqiang Chen, and Hong-Xing Wang. 2021. "Fabrication of a Micron-Scale Three-Dimensional Single Crystal Diamond Channel Using a Micro-Jet Water-Assisted Laser" Materials 14, no. 11: 3006. https://doi.org/10.3390/ma14113006

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