Zhao, L.; Shang, H.; Wang, D.; Liu, Y.; Tian, B.; Wang, W.
Fabrication of SiC Sealing Cavity Structure for All-SiC Piezoresistive Pressure Sensor Applications. Materials 2021, 14, 128.
https://doi.org/10.3390/ma14010128
AMA Style
Zhao L, Shang H, Wang D, Liu Y, Tian B, Wang W.
Fabrication of SiC Sealing Cavity Structure for All-SiC Piezoresistive Pressure Sensor Applications. Materials. 2021; 14(1):128.
https://doi.org/10.3390/ma14010128
Chicago/Turabian Style
Zhao, Lihuan, Haiping Shang, Dahai Wang, Yang Liu, Baohua Tian, and Weibing Wang.
2021. "Fabrication of SiC Sealing Cavity Structure for All-SiC Piezoresistive Pressure Sensor Applications" Materials 14, no. 1: 128.
https://doi.org/10.3390/ma14010128
APA Style
Zhao, L., Shang, H., Wang, D., Liu, Y., Tian, B., & Wang, W.
(2021). Fabrication of SiC Sealing Cavity Structure for All-SiC Piezoresistive Pressure Sensor Applications. Materials, 14(1), 128.
https://doi.org/10.3390/ma14010128