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Journal: Materials, 2020
Volume: 13
Number: 4490
4490
Article: Cathodoluminescence Spectroscopic Stress Analysis for Silicon Oxide Film and Its Damage Evaluation
Authors: by Shingo Kammachi, Yoshiharu Goshima, Nobutaka Goami, Naoaki Yamashita, Shigeru Kakinuma, Kentaro Nishikata, Nobuyuki Naka, Shozo Inoue and Takahiro Namazu
Link: https://www.mdpi.com/1996-1944/13/20/4490

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