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Article

Modeling and Experimental Study of the Localized Electrochemical Micro Additive Manufacturing Technology Based on the FluidFM

Ministry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Department of Mechanical and Electrical Engineering, Changchun University of Science and Technology, Changchun 130012, China
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Materials 2020, 13(12), 2783; https://doi.org/10.3390/ma13122783
Received: 17 April 2020 / Revised: 9 June 2020 / Accepted: 17 June 2020 / Published: 19 June 2020
In this work, the localized electrochemical micro additive manufacturing technology based on the FluidFM (fluidic force microscope) has been introduced to fabricate micro three-dimensional overhang metal structures at sub-micron resolution. It breaks through the localized deposition previously achieved by micro-anode precision movement, and the micro-injection of the electrolyte is achieved in a stable electric field distribution. The structure of electrochemical facilities has been designed and optimized. More importantly, the local electrochemical deposition process has been analyzed with positive source diffusion, and the mathematical modeling has been revealed in the particle conversion process. A mathematical model is proposed for the species flux under the action of pulsed pressure in an innovatively localized liquid feeding process. Besides, the linear structure, bulk structure, complex structure, and large-area structure of the additive manufacturing are analyzed separately. The experimental diameter of the deposited cylinder structure is linearly fitted. The aspect ratio of the structure is greater than 20, the surface roughness value is between 0.1–0.2 μm at the surface of bulk structures, and the abilities are verified for deposition of overhang, hollow complex structures. Moreover, this work verifies the feasibility of 3D overhang array submicron structure additive manufacturing, with the application of pulsed pressure. Furthermore, this technology opens new avenues for the direct fabrication of nano circuit interconnection, tiny sensors, and micro antennas. View Full-Text
Keywords: localized electrochemical; micro additive manufacturing; 3D micro overhang structure; FluidFM localized electrochemical; micro additive manufacturing; 3D micro overhang structure; FluidFM
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MDPI and ACS Style

Ren, W.; Xu, J.; Lian, Z.; Yu, P.; Yu, H. Modeling and Experimental Study of the Localized Electrochemical Micro Additive Manufacturing Technology Based on the FluidFM. Materials 2020, 13, 2783. https://doi.org/10.3390/ma13122783

AMA Style

Ren W, Xu J, Lian Z, Yu P, Yu H. Modeling and Experimental Study of the Localized Electrochemical Micro Additive Manufacturing Technology Based on the FluidFM. Materials. 2020; 13(12):2783. https://doi.org/10.3390/ma13122783

Chicago/Turabian Style

Ren, Wanfei, Jinkai Xu, Zhongxu Lian, Peng Yu, and Huadong Yu. 2020. "Modeling and Experimental Study of the Localized Electrochemical Micro Additive Manufacturing Technology Based on the FluidFM" Materials 13, no. 12: 2783. https://doi.org/10.3390/ma13122783

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