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Mo-La2O3 Multilayer Metallization Systems for High Temperature Surface Acoustic Wave Sensor Devices

1
Leibniz IFW Dresden, Helmholtzstraße 20, 01069 Dresden, Germany
2
TU Dresden, Institute for Materials Science, 01069 Dresden, Germany
*
Authors to whom correspondence should be addressed.
Materials 2019, 12(17), 2651; https://doi.org/10.3390/ma12172651
Received: 16 July 2019 / Revised: 9 August 2019 / Accepted: 13 August 2019 / Published: 21 August 2019
Developing advanced thin film materials is the key challenge in high-temperature applications of surface acoustic wave sensor devices. One hundred nanometer thick (Mo-La 2 O 3 ) multilayer systems were fabricated at room temperature on thermally oxidized (100) Si substrates (SiO 2 /Si) to study the effect of lanthanum oxide on the electrical resistivity of molybdenum thin films and their high-temperature stability. The multilayer systems were deposited by the magnetron sputter deposition of extremely thin (≤1 nm) La interlayers in between adjacent Mo layers. After deposition of each La layer the process was interrupted for 25 to 60 min to oxidize the La using the residual oxygen in the high vacuum of the deposition chamber. The samples were annealed at 800 C in high vacuum for up to 120 h. In case of a 1 nm thick La interlayer in-between the Mo a continuous layer of La 2 O 3 is formed. For thinner La layers an interlayer between adjacent Mo layers is observed consisting of a (La 2 O 3 -Mo) mixed structure of molybdenum and nm-sized lanthanum oxide particles. Measurements show that the (Mo-La 2 O 3 ) multilayer systems on SiO 2 /Si substrates are stable at least up to 800 C for 120 h in high vacuum conditions. View Full-Text
Keywords: SAW sensors; interdigital transducer material; high-temperature stability; dispersion strengthening; Mo-La2O3 multilayers SAW sensors; interdigital transducer material; high-temperature stability; dispersion strengthening; Mo-La2O3 multilayers
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MDPI and ACS Style

Menzel, S.B.; Seifert, M.; Priyadarshi, A.; Rane, G.K.; Park, E.; Oswald, S.; Gemming, T. Mo-La2O3 Multilayer Metallization Systems for High Temperature Surface Acoustic Wave Sensor Devices. Materials 2019, 12, 2651.

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