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Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO2 Balls Mask

1
Institute of Wide Bandgap Semiconductors, Xi’an Jiaotong University, Xi’an 710049, China
2
Key Lab for Physical Electronics and Devices of the Ministry of Education, School of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China
3
Department of Electrical Engineering, Sukkur IBA University, Sukkur 65200, Pakistan
4
School of Materials Science and Engineering, Taiyuan University of Science and Technology, Taiyuan 030024, China
*
Author to whom correspondence should be addressed.
Materials 2019, 12(10), 1622; https://doi.org/10.3390/ma12101622
Received: 22 April 2019 / Revised: 11 May 2019 / Accepted: 16 May 2019 / Published: 17 May 2019
(This article belongs to the Section Carbon Materials)
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Abstract

Submicron lenses and cylinders exhibiting excellent properties in photodetector and quantum applications have been fabricated on a diamond surface by an inductively-coupled plasma (ICP) etching technique. During ICP etching, a layer containing 500 nm diameter balls of SiO2 was employed as mask. By changing the mixing ratio of O2, Ar and CF4 during ICP etching, several submicron structures were fabricated, such as cylinders and lenses. The simulation results demonstrated that such submicron structures on a diamond’s surface can greatly enhance the photon out-coupling efficiency of embedded nitrogen-vacancy center. View Full-Text
Keywords: diamond; NV center; microstructure fabrication; micro-optical devices diamond; NV center; microstructure fabrication; micro-optical devices
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Liu, Z.; Zhu, T.-F.; Wang, Y.-F.; Ahmed, I.; Liu, Z.; Wen, F.; Zhang, X.; Wang, W.; Fan, S.; Wang, K.; Wang, H.-X. Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO2 Balls Mask. Materials 2019, 12, 1622.

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