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Journal: Materials, 2018
Volume: 11
Number: 1601

Article: Enhanced Electrical Properties of Atomic Layer Deposited LaxAlyO Thin Films with Stress Relieved Preoxide Pretreatment
Authors: by Xing Wang, Hongxia Liu, Lu Zhao and Yongte Wang
Link: https://www.mdpi.com/1996-1944/11/9/1601

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