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Journal: Energies, 2021
Volume: 14
Number: 4538
4538
Article: Fabrication of Silicon Nanowire Metal-Oxide-Semiconductor Capacitors with Al₂O₃/TiO₂/Al₂O₃ Stacked Dielectric Films for the Application to Energy Storage Devices
Authors: by Ryota Nezasa, Kazuhiro Gotoh, Shinya Kato, Satoru Miyamoto, Noritaka Usami and Yasuyoshi Kurokawa
Link: https://www.mdpi.com/1996-1073/14/15/4538

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