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Journal: Energies, 2021
Volume: 14
Number: 3138
Article:
Investigation of Compact Hollow-Anode Discharge Source for Copper Thin Films by Sputtering Processes
Authors:
by
In-Je Kang, Ji-Hun Kim, In-Sun Park and Kyu-Sun Chung
Link:
https://www.mdpi.com/1996-1073/14/11/3138
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