Next Article in Journal
A Real-Time Spectroscopic Sensor for Monitoring Laser Welding Processes
Next Article in Special Issue
A Butyl Methacrylate Monolithic Column Prepared In-Situ on a Microfluidic Chip and its Applications
Previous Article in Journal
Optical and Electronic NOx Sensors for Applications in Mechatronics
Previous Article in Special Issue
Effects of Anode Flow Field Design on CO2 Bubble Behavior in μDMFC
Article Menu

Export Article

Open AccessArticle
Sensors 2009, 9(5), 3357-3375;

Mechanical-Thermal Noise in Drive-Mode of a Silicon Micro-Gyroscope

College of Instrument Science & Engineering, Southeast University, Nanjing 210096, China
Author to whom correspondence should be addressed.
Received: 7 April 2009 / Accepted: 6 May 2009 / Published: 7 May 2009
Full-Text   |   PDF [517 KB, uploaded 21 June 2014]


A new closed-loop drive scheme which decouples the phase and the gain of the closed-loop driving system was designed in a Silicon Micro-Gyroscope (SMG). We deduce the system model of closed-loop driving and use stochastic averaging to obtain an approximate “slow” system that clarifies the effect of thermal noise. The effects of mechanical-thermal noise on the driving performance of the SMG, including the noise spectral density of the driving amplitude and frequency, are derived. By calculating and comparing the noise amplitude due to thermal noise both in the opened-loop driving and in the closed-loop driving, we find that the closed-loop driving does not reduce the RMS noise amplitude. We observe that the RMS noise frequency can be reduced by increasing the quality factor and the drive amplitude in the closed-loop driving system. The experiment and simulation validate the feasibility of closed-loop driving and confirm the validity of the averaged equation and its stablility criterion. The experiment and simulation results indicate the electrical noise of closed-loop driving circuitry is bigger than the mechanical-thermal noise and as the driving mass decreases, the mechanical-thermal noise may get bigger than the electrical noise of the closed-loop driving circuitry. View Full-Text
Keywords: Silicon Micro-Gyroscope (SMG); drive-mode; thermal noise; stochastic averaging Silicon Micro-Gyroscope (SMG); drive-mode; thermal noise; stochastic averaging
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Share & Cite This Article

MDPI and ACS Style

Yang, B.; Wang, S.; Li, H.; Zhou, B. Mechanical-Thermal Noise in Drive-Mode of a Silicon Micro-Gyroscope. Sensors 2009, 9, 3357-3375.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top