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Search Results (3)

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Keywords = Silicon Micro-Gyroscope (SMG)

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17 pages, 1700 KB  
Article
A Digitalized Silicon Microgyroscope Based on Embedded FPGA
by Dunzhu Xia, Cheng Yu and Yuliang Wang
Sensors 2012, 12(10), 13150-13166; https://doi.org/10.3390/s121013150 - 27 Sep 2012
Cited by 22 | Viewed by 7684
Abstract
This paper presents a novel digital miniaturization method for a prototype silicon micro-gyroscope (SMG) with the symmetrical and decoupled structure. The schematic blocks of the overall system consist of high precision analog front-end interface, high-speed 18-bit analog to digital convertor, a high-performance core [...] Read more.
This paper presents a novel digital miniaturization method for a prototype silicon micro-gyroscope (SMG) with the symmetrical and decoupled structure. The schematic blocks of the overall system consist of high precision analog front-end interface, high-speed 18-bit analog to digital convertor, a high-performance core Field Programmable Gate Array (FPGA) chip and other peripherals such as high-speed serial ports for transmitting data. In drive mode, the closed-loop drive circuit are implemented by automatic gain control (AGC) loop and software phase-locked loop (SPLL) based on the Coordinated Rotation Digital Computer (CORDIC) algorithm. Meanwhile, the sense demodulation module based on varying step least mean square demodulation (LMSD) are addressed in detail. All kinds of algorithms are simulated by Simulink and DSPbuilder tools, which is in good agreement with the theoretical design. The experimental results have fully demonstrated the stability and flexibility of the system. Full article
(This article belongs to the Section Physical Sensors)
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20 pages, 1334 KB  
Article
Development of a Prototype Miniature Silicon Microgyroscope
by Dunzhu Xia, Shuling Chen and Shourong Wang
Sensors 2009, 9(6), 4586-4605; https://doi.org/10.3390/s90604586 - 11 Jun 2009
Cited by 18 | Viewed by 13584
Abstract
A miniature vacuum-packaged silicon microgyroscope (SMG) with symmetrical and decoupled structure was designed to prevent unintended coupling between drive and sense modes. To ensure high resonant stability and strong disturbance resisting capacity, a self-oscillating closed-loop circuit including an automatic gain control (AGC) loop [...] Read more.
A miniature vacuum-packaged silicon microgyroscope (SMG) with symmetrical and decoupled structure was designed to prevent unintended coupling between drive and sense modes. To ensure high resonant stability and strong disturbance resisting capacity, a self-oscillating closed-loop circuit including an automatic gain control (AGC) loop based on electrostatic force feedback is adopted in drive mode, while, dual-channel decomposition and reconstruction closed loops are applied in sense mode. Moreover, the temperature effect on its zero bias was characterized experimentally and a practical compensation method is given. The testing results demonstrate that the useful signal and quadrature signal will not interact with each other because their phases are decoupled. Under a scale factor condition of 9.6 mV/o/s, in full measurement range of ± 300 deg/s, the zero bias stability reaches 15o/h with worse-case nonlinearity of 400 ppm, and the temperature variation trend of the SMG bias is thus largely eliminated, so that the maximum bias value is reduced to one tenth of the original after compensation from -40 oC to 80 oC. Full article
(This article belongs to the Special Issue Selected Papers from the 1st International Conference of the Chinese Society of Micro/Nano Technology)
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19 pages, 517 KB  
Article
Mechanical-Thermal Noise in Drive-Mode of a Silicon Micro-Gyroscope
by Bo Yang, Shourong Wang, Hongsheng Li and Bailing Zhou
Sensors 2009, 9(5), 3357-3375; https://doi.org/10.3390/s90503357 - 7 May 2009
Cited by 15 | Viewed by 12233
Abstract
A new closed-loop drive scheme which decouples the phase and the gain of the closed-loop driving system was designed in a Silicon Micro-Gyroscope (SMG). We deduce the system model of closed-loop driving and use stochastic averaging to obtain an approximate “slow” system that [...] Read more.
A new closed-loop drive scheme which decouples the phase and the gain of the closed-loop driving system was designed in a Silicon Micro-Gyroscope (SMG). We deduce the system model of closed-loop driving and use stochastic averaging to obtain an approximate “slow” system that clarifies the effect of thermal noise. The effects of mechanical-thermal noise on the driving performance of the SMG, including the noise spectral density of the driving amplitude and frequency, are derived. By calculating and comparing the noise amplitude due to thermal noise both in the opened-loop driving and in the closed-loop driving, we find that the closed-loop driving does not reduce the RMS noise amplitude. We observe that the RMS noise frequency can be reduced by increasing the quality factor and the drive amplitude in the closed-loop driving system. The experiment and simulation validate the feasibility of closed-loop driving and confirm the validity of the averaged equation and its stablility criterion. The experiment and simulation results indicate the electrical noise of closed-loop driving circuitry is bigger than the mechanical-thermal noise and as the driving mass decreases, the mechanical-thermal noise may get bigger than the electrical noise of the closed-loop driving circuitry. Full article
(This article belongs to the Special Issue Selected Papers from the 1st International Conference of the Chinese Society of Micro/Nano Technology)
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