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Journal: Sensors, 2009
Volume: 9
Number: 3228
Article:
Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine
Authors:
by
Arti Tibrewala, Norbert Hofmann, Anurak Phataralaoha, Gerd Jäger and Stephanus Büttgenbach
Link:
https://www.mdpi.com/1424-8220/9/5/3228
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